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Summary Of: Clean room
Entrance to a clean room with no air shower... Entrance to a clean room with no air shower...
Encyclodia Page On: Clean room
These Are Links To Other Documents
Cleanroom Software Engineering
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Clean room design
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NASA
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Glenn Research Center
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Cardiff University
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Cardiff University
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Microelectronics
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manufacturing
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pollutants
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microbes
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aerosol
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μm
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semiconductor manufacturing
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biotechnology
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life sciences
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air
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filtered
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HEPA
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ULPA
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airlocks
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air shower
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mops
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buckets
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paper
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pencils
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fabrics
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sterile
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particle counter
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positive pressure
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HVAC
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humidity
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electrostatic discharge
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cleanroom suit
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µm
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logarithm
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US FED STD 209E
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November 29
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2001
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ISO 14644-1
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ISO 14698
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ISO 14644
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Contamination control
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Pneumatic filter
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Semiconductor device fabrication
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Categories
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Rooms
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Integrated circuits
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Semiconductor device fabrication
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This article is licensed under the
GNU Free Documentation License
. It uses material from the
Wikipedia article "Clean room"
.